· 2021· Book chapter
Pulsed Laser Deposition of Thin Films
- 3,159citations
- 2021year
Short summary
Pulsed Laser Deposition (PLD) has become a valuable tool for depositing complex multicomponent oxide thin films with controlled stoichiometry, building on its 1964 proof of concept.
AI-generated from the title and abstract; the full text is not read.
Key points
- PLD, first proven in 1964, is effective for depositing multicomponent oxide thin films with controlled stoichiometry.
- The technique has been successfully applied to materials like Yttrium barium copper oxide and Ca-doped BaTiO3.
- Oxide substrates offer advantages over Si and sapphire for nitride thin film growth, including better lattice matching and thermal expansion.
- Oxide reactivity aids in producing freestanding nitride thin films through easy peeling.
AI-generated from the title and abstract; the full text is not read.
Abstract
In 1964 Smith and Turner provided the first ever proof of concept for the pulsed laser deposition (PLD) of thin films. The ability of PLD to deposit multicomponent oxide materials with complex stoichiometry as thin films in a controlled manner quickly evolved PLD into a valuable tool for thin-film ceramic material research. The effect of Ca-doped BaTiO3 polycrystalline thin films deposited on Pt-coated Si substrates using pulsed excimer laser ablation technique is reported by Victor et al. Yttrium barium copper oxide, one of the most prevalent high-temperature superconductors, was one of the first complex materials to be successfully deposited as a thin film by using PLD. Oxide substrates have many advantages over Si and sapphire, including lower lattice mismatch with nitride thin films, less difference in coefficient of thermal expansion, ability to grow non-polar nitride films, and higher reactivity of oxides providing easy peeling of nitride films to obtain freestanding nitride thin films.
The authors' abstract, as published at the source., 2021 · DOI ↗
Continue with a free account
Ask the paper: 3 free questions a day about this paper; save it, get its citation, new summaries every day for your field. Takeaways are Premium.
Continue free on the webSign in with Google or Apple; no card needed. You come back to this paper.
On your phone:
Field: Electrical and Electronic Engineering
Electrical and Electronic EngineeringEngineering