Journal of Vacuum Science & Technology A Vacuum Surfaces and Films· 2018Q2· Review
Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
- 820citations
- Q2SCImago
- 2018year
Short summary
A kinetic model is outlined that reproduces intrinsic stress dependence on grain size, growth rate, and deposited energy, based on in situ diagnostics.
AI-generated from the title and abstract; the full text is not read.
TakeawaysIn the app
Key pointsIn the app
Ask the paperIn the app
The rest is in the Pofolia app
Takeaways, key points and questions to the paper; new summaries every day for your field. Free.
Sign in on the web to openField: Mechanics of Materials
Mechanics of MaterialsEngineering