Micromachines· 2020Q2· Review
MEMS Mirrors for LiDAR: A Review
- 441citations
- Q2SCImago
- 2020year
Short summary
This review details Microelectromechanical Systems (MEMS) scanning mirrors for LiDAR, highlighting their advantages in size, speed, and cost for autonomous vehicles.
AI-generated from the title and abstract; the full text is not read.
Key points
- MEMS scanning mirrors are ideal for LiDAR systems due to their small size, high speed, and low cost.
- LiDAR is a critical sensor for autonomous driving and flying, providing accurate 3D information.
- A figure of merit (FoM) is defined for MEMS mirrors in LiDAR, considering aperture size, field of view, and resonant frequency.
- Various MEMS mirror designs are compared using this FoM.
AI-generated from the title and abstract; the full text is not read.
Abstract
In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.
The authors' abstract, as published at the source. Micromachines, 2020 · DOI ↗
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Field: Instrumentation
InstrumentationPhysics and Astronomy