Nature· 2022Q1
A large-scale microelectromechanical-systems-based silicon photonics LiDAR
- 423citations
- Q1SCImago
- 2022year
Short summary
A 16,384-pixel LiDAR with a 70° × 70° field of view and 0.6° resolution has been developed on a 10×11mm silicon photonic chip using MEMS-actuated optical switches, enabling random-access beam addressing at sub-MHz speeds.
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InstrumentationPhysics and Astronomy