Journal of the European Ceramic Society· 2026Q1
Impact of annealing parameters on the structural and chemical properties of polymer-derived SiC thin films
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- 2026year
Short summary
Annealing polymer-derived SiC thin films for 10 hours or longer at 1200°C promotes the formation of polycrystalline β-SiC nanocrystals, while oxide content reduces from 100% to 10% with 24-hour annealing.
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Key points
- Annealing SMP-10 thin films for 10+ hours at 1200°C leads to polycrystalline β-SiC nanocrystal formation.
- Samples annealed for 1 hour were entirely oxides; 24-hour annealing resulted in 10% oxide content and Si–C bonds.
- Solvent dilution of SMP-10 did not significantly affect thin film evolution.
- Annealing conditions, not precursor concentration, control the morphology and chemistry of the transformation.
AI-generated from the title and abstract; the full text is not read.
Abstract
This study examines the structural and chemical evolution of the polymer-derived SMP-10 thin films as a function of annealing time and solvent dilution. Increasing annealing times at 1200°C strongly influences thin film morphology and composition. Samples annealed to 5 h remained amorphous, whereas annealing for 10 h and longer led to the formation and growth of circular regions with a polycrystalline microstructure, serving as nucleation sites for β-SiC nanocrystals. Longer annealing times promote continuous oxide reduction, where samples annealed for 1 h consisted entirely of oxides, whereas 24 h annealing led to the development of characteristic Si–C bonds accompanied by an oxide content of 10%. In contrast, SMP-10 dilution had no significant effect on thin film evolution, exhibiting consistent shrinkage of 45-50% after annealing. These results demonstrate that annealing conditions govern thin film morphology and chemistry rather than precursor concentrations during the transformation of SMP-10 into nanocrystalline β-SiC thin films.
The authors' abstract, as published at the source. Journal of the European Ceramic Society, 2026 · DOI ↗
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Field: Ceramics and Composites
Ceramics and CompositesMaterials Science